Determination of the lateral resolution of an interference microsope using a micro-scale sphere

Su, Rong; Thomas, Matthew; De Groot, Peter; Coupland, Jeremy; Leach, Richard

Determination of the lateral resolution of an interference microsope using a micro-scale sphere

Su, Rong; Thomas, Matthew; De Groot, Peter; Coupland, Jeremy; Leach, Richard

Authors

Rong Su

Matthew Thomas

Peter De Groot

Jeremy Coupland

Professor RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
CHAIR IN METROLOGY

Citation

Su, R., Thomas, M., De Groot, P., Coupland, J., & Leach, R. (2018, November). Determination of the lateral resolution of an interference microsope using a micro-scale sphere. Presented at 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, Nevada

Presentation Conference Type	Conference Paper (published)
Conference Name	33rd Annual Meeting of the American Society for Precision Engineering
Start Date	Nov 4, 2018
End Date	Nov 9, 2018
Acceptance Date	May 26, 2018
Online Publication Date	Nov 4, 2018
Publication Date	Nov 4, 2018
Deposit Date	Nov 28, 2018
Publicly Available Date	Nov 28, 2018
Book Title	Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018
Public URL	https://nottingham-repository.worktribe.com/output/1316655
Contract Date	Nov 28, 2018